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Peeling of Thin films

 
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Drew
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Posted: Sat Nov 20, 2025 7:11 am    Post subject: Peeling of Thin films
 
What are the factors that affects the adhesion of nitride films in galium arsenide wafers? what's is the most likely cause of this when in silicon base wafers peeling is not evident? both wafers were run in one PECVD machine at the same time.

Drew
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