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Wafer-Level Packaging (Page 2 of 3)
Different
companies using redistribution technology implement it using different
materials and processes. Nonetheless, the sequence of steps
required are more or less similar. The first layer put over the wafer to
'package' the device is usually a benzocyclobutane (BCB)-based polymer
dielectric, to isolate the device circuitry from the rewiring system.
The rewiring
metallization layer, usually Cu, Al, or a specially-developed alloy, is
then deposited over this dielectric. This layer is then covered by
another BCB dielectric layer serving as the solder mask. Underbump
metallization is then put over the positions to be subsequently occupied
by the solder balls. After the balls have been attached, flip-chip
techniques are used to mount the WLP device onto the circuit board.
Encapsulated
Copper Post
technology is very similar to redistribution and bump technology in the
sense that the chip's bond pads are also rerouted into an area array of
interconnection points. In this technology, however, these
interconnection points are in the form of electroplated copper posts,
instead of pads.
These copper
posts provide enough stand-off for the active wafer surface to be
encapsulated in low-stress epoxy by transfer molding, exposing only the
top portions of the posts where the solder balls will be attached.
This WLP technology is supported mainly by Japanese companies.
Encapsulated
Wire Bond
technology
mainly pertains to the Wire-on-Wafer (WOW) technology developed by Form
Factor. Again, this technology employs a redistribution layer to
reroute the device peripheral I/O's (bond pads) to meet the desired
pitch. Using a modified gold ball bonder, gold ball-bumped
micro-spring bond wires are formed on the redistributed pads.
The
technology for the micro-spring structures employed by this system
originated from Form Factor's earlier efforts to come up with highly
compliant contactors for fine-pitched probe cards. The micro-spring bond
wires are then overcoated with electroless Ni/Au to make them more
robust without sacrificing compliancy.
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