Oxidizers

Characteristics

- not flammable by themselves

- can ignite or drastically increase the flammability of combustible materials

Protection Required

- keep away from combustible materials

Hazardous Effects

- can exhibit violent reactions with combustible materials that may lead to burns and other forms of injury

First Aid Treatment

- continuously flush with large amounts of running water

Examples

1) Oxygen (O₂) - used in plasma etching, etc.

2) Hydrogen Peroxide (H₂O₂) - used for cleaning and etching

3) Chromic Acid  - used for cleaning and etching

Toxic / Corrosive Gases

Characteristics

- compressed gas inside cylinders

- most, but not all, exhibit a noticeable odor

Protection Required

- availability of self-contained air supply where exposure is possible

- installation of gas leak detectors

Hazardous Effects

- can be highly toxic or even fatal if inhaled

First Aid Treatment

- transport to a hospital in as short a time as possible

Examples

1) Arsine (AsH₃) - used as a source of As as n-type dopant

2) Phosphine (PH₃) - used  as a source of P as n-type dopant

3) Chlorine (Cl₂) - used in etching

4) Silane (SiH₄) - used in deposition processes

5) Ammonia (NH₃) - used as a source of nitrogen

Bulk Nitrogen

Characteristics

- colorless, odorless gas

- displaces air

Protection Required

- availability of self-contained air supply where exposure is possible

- installation of gas leak detectors

Hazardous Effects

- can lead to suffocation and even death in areas where the air has been displaced by bulk nitrogen

First Aid Treatment

- remove from the nitrogen-filled area and transport to a hospital in as short a time as possible