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Wafer Fab Chemical Reactions

Semicon Materials

       

    

   

 

 

 

Hazardous Chemicals (Page 2 of 3)

             

Table 2. Water-Reactive Chemicals     

Water-Reactive Chemicals

Characteristics

- exhibits a reaction with water, possibly a violent one

Protection Required

- store in safe containers and racks away from water

- total cover for skin where exposure is possible using the appropriate protective gear

- availability of self-contained air supply in places where fumes may be generated

Hazardous Effects

- evolves toxic, explosive, or corrosive fumes upon contact with water

- can result in explosion if the reaction is forced to confinement

First Aid Treatment

- for exposures, continuously flush with large amounts of running water

- for inhalations, immediately evacuate person to open areas with large amounts of fresh air

Example

 

Alkali metals such as Cesium - used in semiconductor-metal interface studies

    

        

Table 3. Organic Solvents

Organic Solvents

Characteristics

- generally flammable

- most are volatile

Protection Required

- protective gear for eyes and hand where exposure is possible

Hazardous Effects

- can generate fumes that are highly toxic when heated or burned

- exposure can cause skin dehydration

- prolonged exposure can damage tissue

First Aid Treatment

- for exposures, continuously flush with large amounts of running water

- for inhalations, immediately evacuate person to open areas with large amounts of fresh air

Examples

  

1) Acetone (CH3COCH3) - used for cleaning, rinsing and drying purposes 

2) Isopropyl Alcohol ((CH3)2CHOH) - used for cleaning, rinsing, drying purposes

3)  Ethylene glycol (C2H4(OH)2) - used in place of water for etches that require selectivity

      

       

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