|
Technique |
Primary Beam |
Energy |
Detected Entity |
Applications |
|
Low
Energy Electron Diffraction (LEEDS) |
Electron |
20-200
eV |
Electron |
Surface
Structure |
|
Scanning
Electron Microscopy (SEM) |
Electron |
300-30,000 eV |
Electron |
Surface
Morphology |
|
Electron
Microprobe (EMP) |
Electron |
1-30 keV |
X-ray |
Surface
Region Composition |
|
Auger
Electron Spectroscopy (AES) |
Electron |
500-10,000 eV |
Electron |
Surface
Layer Composition |
|
Transmission Electron Microscopy (TEM) |
Electron |
100-400
keV |
Electron |
High
Resolution Structure |
|
Scanning
TEM (STEM) |
Electron |
100-400
keV |
Electron,
X-ray |
Imaging,
X-ray Analysis |
|
Electron
Energy Loss Spectroscopy (EELS) |
Electron |
100-400
keV |
Electron |
Small
local area composition |
|
Ion
Scattering Spectrometry (ISS) |
Ion |
500-2000
eV |
Ion |
Surface
composition |
|
Secondary Ion Mass Spectrometry (SIMS) |
Ion |
1-15 keV |
Ion |
Trace
composition vs. depth |
|
Secondary Neutral Mass Spectrometry (SNMS) |
Ion |
1-15 keV |
Atom |
Trace
composition vs. depth |
|
Particle
Induced X-ray Emission (PIXE) |
Ion |
>= 1 keV |
X-ray |
Trace
composition |
|
Scanning
Ion Microscope (SIM) |
Ion |
5-20 keV |
Electron |
Surface
characterization |
|
Rutherford Backscatter-ing Spectroscopy (RBS) |
Ion |
> 1 MeV |
Ion |
Composition vs. depth |
|
X-ray
Fluorescence (XRF) |
Photon |
> 1 keV |
X-ray |
Composition |
|
X-ray
Diffraction (XRD) |
Photon |
> 1 keV |
X-ray |
Crystal
Structure |
|
X-ray
Photoelectron Spectroscopy (XPS or ESCA) |
Photon |
> 1 keV |
Electron |
Surface
Composition |
|
Laser
Microprobe (LMP) |
Photon |
Laser |
Ion |
Composition |
|
Laser
Ion Mass Spectroscopy (LIMS) |
Photon |
Laser |
Ion |
Composition |
|
Laser
Emission Microprobe (LEM) |
Photon |
Laser |
Light |
Trace
Elements |
|
Neutron
Activation Analysis (NAA) |
Neutron |
Reactor |
Gamma
ray |
Bulk
Composition |
