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EDX Analysis and WDX Analysis (Page 2 of 2)
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to Page 1 - EDX Analysis Basics>
When performing EDX analysis, the following must be
observed:
2) Spot Mode operation must be used for contaminants suspected to be concentrated in very small
regions.
3) The EHT level used during the analysis must be higher than the energy peaks corresponding to the elements of
interest.
Failure Mechanisms/Attributes Tested
for by EDX Analysis: Inorganic Contamination, Elemental
Composition
Figure
2. Example of an EDX Spectrum
WDX Analysis stands for
Wavelength Dispersive X-ray analysis. It is sometimes referred to also as
WDS analysis.
WDX analysis
works in pretty much the same way as EDX analysis, except that its
detector classifies and counts the impinging X-rays in terms of its
characteristic
wavelengths.
The detector system uses an X-ray analyzing crystal that only allows the
diffraction of desired wavelengths into the X-ray detector for counting.
Advantages
of WDX analysis over EDX analysis include: 1) a much better energy
resolution, preventing many peak overlap errors frequently encountered in
EDX analysis; and 2) lower background noise allowing a more accurate
quantitative analysis.
Its
disadvantages
include:
1) higher time consumption; 2) greater sample damage and chamber
contamination because of the high beam currents required; and 3) high
cost.
See Also:
SEM/TEM;
Auger Analysis;
FTIR Spectroscopy;
SIMS;
LIMS;
ESCA or XPS;
Chromatography;
Failure
Analysis;
Copyright
© 2001-2004
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